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Side 1 T= 6 ppm

Side 2 R=90ppm

~14 ppm/cm

CIT Data covers the center 150mm

ETM02-180, Dataset has Tilt and Power subtracted (Z1, Z2 & Z3), there are no missing data points within the set

Z36_ETM02-180 Zernike Coefficients for this data set (about Zernike Coeffs, we use the Wyko definitions)

Radius of curvature: See last column at Index

Image of the dataset ETM02-180